FOROB II

BAVARIAN JOINT RESEARCH PROGRAM FOR SURFACE TECHNOLOGY

FOROB 2

II. Function layers

In this area the thermal, dielectric or luminescend properties of surface coatings are of special interest. The development being succsessful, integration density in microelectronics can be further increased for capacitors can be constructed in smaller dimensions or because heat fluxes can be diagnosed or bleede off in a better way. The targeted deposition of diamond on tungsten-copper alloys or of barium-strontium-titanate on silicon are completely new.

Projects

  • II.4 Smoothed diamond coatings as heat straddlers and tribo pairings
    more
  • II.3 Optimization of CVD reactor and process design by numerical simulation for refinement of layer-thickness homogeneity
    more

Information

Launching date

04.1998

End

03.2001