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FOROB II

BAVARIAN JOINT RESEARCH PROGRAM FOR SURFACE TECHNOLOGY

Klaus Lehmbacher

Contact

TU München
Lehrstuhl für Anorganische Chemie
Lichtenbergstraße 4
85747 Garching

Projects

II. Function layers
- II.2 Chemical vapour deposition of thin films with high relative permittivity instanced by barium-strontium-titanate

Information

Launching date

04.1998

End

03.2001